A PTW Group company Start an enquiry ↗

Independent CD-SEM support · Worldwide

Keep critical Hitachi CD-SEM systems productive.

High-value component repair, exchange, engineered upgrades and on-site service for legacy and selected newer-generation systems.

Find support → Explore capabilities
2014Founded in Singapore
GlobalPTW service network
FocusedHitachi CD-SEM expertise
Tazmo robot assembly supported by Jesse Technology
TAZMO ROBOT OVERHAUL / EXCHANGE
CAPABILITY STATUSRepair programme active
JT-RT-01
01

Start with what you know

Model, part number or fault.

⌕
Popular: CG4000 CG4100 CG5000 CG6300 S-9380II S-9260A

High-value repair focus

Fix the assemblies that keep the tool alive.

A practical second-source route for hard-to-source, repairable and obsolete subsystems.

01↗

HV controllers

Component-level diagnosis, repair and exchange support for high-voltage electronics and related assemblies.

Repair / Exchange / Test
02↗

Robots & controllers

Tazmo robot, aligner and controller overhaul - supported by inspection, teaching and functional testing.

Overhaul / Align / Qualify
03↗

Stage, laser & vacuum

Support for stage metrology, interferometer lasers, TMP systems, evacuation electronics and control boards.

Repair / Calibrate / Exchange

Supported installed base

From proven S-series tools to the CG platform.

Explore service and component capability by system. CG6300 support is being introduced progressively and remains subject to engineering review.

Discuss your installed base →
Legacy productionS-7800 - S-9380II
Core CG capabilityCG4000 · CG4100
Expanded supportCG5000
Capability developmentCG6300 Under review
Robot controller connection panel FIELD + WORKSHOP

On-site services

Engineering support built around uptime.

01Troubleshooting & recovery↗ 02Annual preventive maintenance↗ 03Image & CD matching↗ 04Installation & relocation↗ 05Training for engineers↗ 06Full-service contracts↗

Obsolescence engineering

When replacement is not available, engineer another path.

Computer emulators, controller replacements, wafer-format conversions and customer-specific improvements - developed around the tool you need to keep running.

Bring us the problem →

Technical enquiry

Show us the part.
Tell us the symptom.

Share the tool model, part number, error or nameplate photo. Our team will confirm the most useful next step without making you search a catalogue first.

Email technical details → Call +65 8183 5662
No pricing is displayed online. Availability and lead times are confirmed for each enquiry.